The YG30 is a compensating thermal enclosure for a precursor bubbler. The temperature can be adjusted between 10 and 30 degrees C. Excursions from the nominal temperature are compensated for by adjusting the carrier gas flow or the cylinder pressure.
The YG30 provides a thermal environment for the bubbler/ampoule containing the precursor. The thermal medium is dry air or nitrogen. The temperature is measured inside the precursor. The enclosure temperature range is from 10°C* to 40°C. The YG30 features an integrated level sensor for liquid and solid precursors
*at an ambient temperature of 20°C