YG15
The YG15 offers a convenient and efficient way of insuring a stable and consitent concentration output from a liquid or solid precursor source. The YG15 compensates for temperature excursions from the nominal temperature of a precursor by adjusting the carrier gas flow through the cylinder/ampoule. In an alternate mode, the YG15 adjusts the total pressure in the cylinder/ampoule.
The five point temperature sensor measures the vertical temperature profile in the cylinder/ampoule. Interpretation of this temperature profile gives information on the status of the cylinder.
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The YG15 augments the signal to a MFC or pressure controller to compensate for temperature excursions of the precursor. This insures that the vapor concentration out of the source.
The bubbler/ampoule condition monitor shows the temperature field inside.
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