About Us

CeeVeeTech was founded on the idea that Chemical Vapor Deposition processes can acheive better yield and higher quality of the product by measuring the temperature of the precursor compound to compensate for the ever-present difference between nominal and actual temperature and a more precise, more safe and higher functional thermal environment .

 

Our compensators and thermal enclosures can be installed in all CVD and ALD tools and instantly enhance performance.  Interfacing with any CVD and ALD tool is seamless.

 

CeeVeeTech has partnered with Innovent Technologies which has a long history of  building high quality systems and assemblies for the semiconductor industry.

 

Contact Information

CeeVeeTech, LLC
6 Centennial Dr

Peabody, MA 01960

USA


Phone: 978-764-1312

E-mail: info@ceeveetech.com

 

 

 

CeeVeeTech Presenation ALD 2019

Temperature Compensation for CVD pecursors
AM-MoP4_woelk.pdf
Adobe Acrobat document [758.0 KB]
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