TMIn

Trimethylindium (TMIn)  bubblers require a carefully managed thermal environment in order to give constant output and maximum utilization. Just immersing the bubbler in a thermal bath is not enough and often leads to shifting TMIn output of a magnitute that negatively affects the deposition quality. The vapor pressure of TMIn changes 9% for every 1 degree C. CeeVeeTech's patent pending Dry Safety MO source thermally manages the bubbler ambient  and controls the infrastructure connected to the bubbler for stable output at high utilization. 

 

Next generation, large TMIn bubblers (>2kg content) in particular require the benefits of temperature measurement and thermal management.

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