TMIn

Trimethylindium (TMIn)  bubblers require a carefully managed thermal environment in order to give constant output and maximum utilization. The simple immersion of the TMIn bubbler in a thermal bath often leads to shifting TMIn output over the life of the source. The  magnitute of this shift in output can negatively affect the deposition quality. The vapor pressure of TMIn changes 9% for every 1 degree C. CeeVeeTech's patent pending Dry Safety MO source thermally manages the bubbler ambient  and augments the signals to the devices connected to the bubbler for stable output at high utilization. 

 

Large TMIn bubblers of more than 1kg content require thermal management to deliver constant output.

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