YG45HT
The YG45HT is a high temperature enclosure for precusors of up to 200°C. The temperature is controlled by measurements that are taken inside of the cylinder/ampoule. Small excursions of the precursor from the nominal temperature are compensated for. The YG45HT features optional continuous level sensing.
CeeVeeTech_YG45HT_datasheet_103.pdf
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Adobe Acrobat document [768.0 KB]
The YG45HT is a thermal enclosure that supports evaporation temperatures of 200°C.
YG45HT cylinder/ampoule temperatures. The temperature profile insures that evaporation / sublimation zone is the coldest spot in the system. This prevents solid precursors from migrating uncontrollably inside the system.
YG45HT with a cylinder installed.
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