YG45HT

The YG45HT is a high temperature enclosure for precusors of up to 200°C. The temperature is controlled by measurements that are taken inside of the cylinder/ampoule. Small excursions of the precursor from the nominal temperature are compensated for. The YG45HT features optional continuous level sensing.

CeeVeeTech_YG45HT_datasheet_103.pdf
Adobe Acrobat document [768.0 KB]

The YG45HT is a thermal enclosure that supports evaporation temperatures of 200°C.

YG45HT cylinder/ampoule temperatures. The temperature profile insures that evaporation / sublimation zone is the coldest spot in the system. This prevents solid precursors from migrating uncontrollably inside the system. 

YG45HT with a cylinder installed.

Print Print | Sitemap
_ © CeeVeeTech 2021