CeeVeeTech Thermal Environments and Compensators improve the productivity of Vapor Deposition Tools for CVD, MOCVD, ALD.

  • extend source life
  • shorten run time
  • eliminate pre-run stabilization time
  • measure source health and state

Contact Information

CeeVeeTech, LLC
6 Centennial Dr

Peabody, MA 01960

USA


Phone: 978-764-1312

E-mail: info@ceeveetech.com

 

 

 

CeeVeeTech Presenation ALD 2019

Temperature Compensation for CVD pecursors
AM-MoP4_woelk.pdf
Adobe Acrobat document [758.0 KB]
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